?!DOCTYPE html> University of Cambridge

Smart Silicon-on-Insulator Sensing Systems Operating at High Temperature


SOI-HITS Project

This project has received funding from the European Union’s Seventh Framework Programme for research, technological development and demonstration under grant agreement no 288481.

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University of Cambridge


University of Cambridge has developed an international standing for advances in science and technology over a period of 600 years.


Its reputation can be measured by more than 70 Noble prizes and other prestigious awards in Physics, Mathematics, Engineering, Medicine and other disciplines. The Department of Engineering is a leading international centre for research and gained the highest possible ranking in the latest assessment of research achievements in British Universities. The Department of Engineering was also ranked first in its class in Europe according to other independent surveys. The Department comprises of approximately 2000 members of staff and students. The HVMS (High Voltage Microelectronics and Sensors) group has an international reputation with more than 400 articles published in international journals and conferences and over 50 patents. It has been sponsored throughout by the industrial and public grants with more than 5 MEuro. The group has built its reputation from advanced numerical simulations, analytical modelling and experimental demonstration of novel power devices in the area of smart power. UCAM will bring along its 20 years of experience and knowledge in smart power devices and related technologies.


Tasks in the project

UCAM leads WP7 and provides the Scientific Coordination. As the leader of WP7, UCAM will be responsible for the dissemination and networking. UCAM will also have significant participation in WP2, and WP3 plus contributions to WP0, 1 and 5.


Experience relevant to the tasks

UCAM brings two decades of experience in the field of micro-hotplate sensors design and fabrication with particular emphasis on SOI technology. Their patented technology was recently exploited commercially, with UWAR’s contribution, in a gas sensing technology start-up, which is now acting as full partner in this project. Cambridge CMOS Sensors develops ultra-low power gas sensors embedded in a Silicon-On- Insulator (SOI) CMOS-compatible membrane.


Curriculum Vitae of key staff

Prof. Florin Udrea is a professor in Engineering Department at Cambridge University. He was also an advanced EPSRC research fellow between August 1998 and July 2003 and prior to this a College Fellow in Girton College, Cambridge University. Prof. Udrea initiated work on SOI devices at Cambridge University in 1997 and together with Prof. W. Milne was awarded a government council grant to investigate and fabricate novel CMOS-compatible SOI power devices. He has published over 250 papers in journals and international conferences and holds 40 international patents. Prof. Udrea won six best paper awards as first author in IEEE international conferences and was awarded a prestigious Leverhulme prize. In 2000 Prof. Udrea, together with Prof. Amaratunga, founded Cambridge Semiconductor to exploit a RESURF type technology in Power ICs. Based on proprietary power IC technologies in SOI and bulk CMOS, the company has sold to date more than 20M units in power supplies and employs around 70 people. Prof. Udrea has also recently co-founded Cambridge CMOS Sensors Ltd to commercialise a micro-hotplate technology in SOI.


Dr Marina Antoniou has received her Phd in 2008 from University of Cambridge, focusing on semiconductor power devices for high power/high temperature applications. Dr. Antoniou has extensive experience on design, fabrication and testing of lateral devices fabricated in SOI membrane technology. She has published more than 20 papers in journals and international conferences and is currently a postdoc research fellow in the HVMS group.

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