?!DOCTYPE html> Cambridge CMOS

Smart Silicon-on-Insulator Sensing Systems Operating at High Temperature


SOI-HITS Project

This project has received funding from the European Union’s Seventh Framework Programme for research, technological development and demonstration under grant agreement no 288481.

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Cambridge CMOS


Cambridge CMOS Sensors Limited is a spin-off company from the University of Cambridge formed in 2008.


The company has been formed to exploit a 'revolutionary' smart technology for gas sensors developed at the University of Cambridge and University of Warwick. The technology offers a radical step change in performance in terms of power consumption (at least one order of magnitude lower than state-of-the-art), integration (fully CMOS compatible), ultra-fast response time, smartness (embedded intelligent design), and allows high volume production at low cost. The company will pursue products/licenses of its smart technology for gas-sensing application.


Tasks in the project

In SOI-HITS, CCS leads WP3, where is responsible for design, simulation and implementation of on chip signal processing electronics. CCS is also actively involved in WP4 and 5, where it will contribute to the fabrication of high temperature integrated circuitry able to withstand high temperatures up to 250°C.


Experience relevant to the task

CCS has patented microsystems technology that involves new types of SOI CMOS heaters for application in microsensors. The technology offers a radical step change in performance in terms of power consumption (at least one order of magnitude lower than state-of-the-art), integration (fully CMOS compatible), ultra-fast response time, smartness (embedded intelligent design), and allows high volume production at low cost.


Curriculum Vitae of key staff

Dr. Syed Z. Ali graduated from GIK Institute (Pakistan) in 2003 with a BS in electronic engineering. He finished his PhD in 2007 at the University of Cambridge (UK) focusing on the design of micro-hotplates for smart gas sensors and electro-thermo-mechanical modelling of membrane devices and was then a research associate at the University of Cambridge researching on micro-hotplates and materials for gas sensing. He is at present a senior R&D engineer at Cambridge CMOS Sensors.


 Prof. William Milne, FREng, has been Head of Electrical Engineering at Cambridge University since 1999 and Head of the Electronic Devices and Materials group since 1996 when he was appointed to the ?944 Chair in Electrical Engineering? He obtained a BSc from St. Andrews University (Scotland) in 1970 and then a PhD in Electronic Materials at Imperial College London in 1973. He was awarded a D.Eng (Honoris Causa) from University of Waterloo, Canada in 2003 and, in 2007, he was elected a Fellow of the Royal Academy of Engineering. His research interests include large area silicon and carbon based electronics, thin film materials and most recently, MEMS, carbon nanotubes and other 1-D structures for electronics applications. Prof Milne has participated in EC projects, namely NANOLITH, CANVAD, NANORAC, DESYGN-IT, CANDICE. He has published/presented ~600 papers in these areas, of which ~120 were invited. He is Director of the Centre for Advanced Photonics and Electronics (CAPE) which is incorporated within the Electrical Engineering Division. CAPE is a partnership between academia and industry. Strategic partners are presently Dow Corning and ALPs electrical. CAPE also has collaborative partnerships with many industrial firms, including Philips, THALES, Seagate, IBM, FEI, Hitachi, Toshiba, Nokia, Epson, to name a few. He is a co-founder and director of Cambridge CMOS Sensors.

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